Study on the Ionic Bombardment in a Glow Discharge Lamp

نویسندگان

  • F. Blum
  • P. A. Büger
  • R. J. Murphy
چکیده

The surface of copper alloys was studied by means of a scanning electron microscope after having been sputtered by a glow discharge source under typical conditions for spectrochemical analysis. The surface topography developed during the process of sputtering gave the following two results: It would appear that the energy spread of the bombarding ions is small and the variation in the angles of incidence of these ions is less than usually accepted.

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تاریخ انتشار 2012